Sensing properties of the anisimkin Jr. acoustic modes in uncoated ST-quartz plates

The Anisimkin Jr. (AN) acoustic plate modes having quasi-longitudinal (QL), quasi-shear-vertical (QSV) and quasi-shear-horizontal (QSH) polarizations are studied experimentally in uncoated ST,X-quartz plates with normalized plate thicknesses h/λ = 1.485 and 1.67 (where h is thickness and λ is wavelength). The sensitivities of the modes toward mass loading (water vapor) are measured at different temperatures in the range 10.6°C to 23°C and compared with that of the Rayleigh SAW. The sensitivity of the same modes toward temperature is measured from 15°C to 85°C and compared with those of the bulk waves propagating in the same direction. Acoustic plate modes with dominant responses toward humidity or temperature are found.