DocumentCode
1708356
Title
Laser and radiofrequency wave creation of seeded air plasmas
Author
Scharer, J. ; Ding, G. ; Guo, Xuemei ; Kelly, K. ; Paller, E.
Author_Institution
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
fYear
1999
Firstpage
118
Abstract
Summary form only given, as follows. We are examining 193 nm laser ionization of an organic seed gas TMAE (tetrakis-dimethyl-amino-ethylene) in air plasma constituents including nitrogen and oxygen. The peak plasma density n/spl ges/10/sup 13/ cm/sup -3/, temperature (T/sub e/=0.2 eV) and lifetimes are measured for pure TMAE and with the air constituents added at pressures from 100 mTorr to atmospheric. The role of superexcited states, metastable states and the seed gas character is discussed. The effect of the wave frequency, magnetic field and antenna design for radiofrequency created plasmas in seed gases (argon and TMAE) and added air constituents are discussed. We examine laser and high voltage spark initiated plasmas at higher pressures and their radiofrequency sustainment. Modelling utilizing the ANTENAII and MAXEB codes are used to describe the wave penetration and absorption for different antennas.
Keywords
high-frequency discharges; organic compounds; plasma density; plasma production by laser; plasma temperature; 0.2 eV; 100 mtorr to 1 atm; 193 nm; ANTENAII code; MAXEB code; TMAE; antenna design; high voltage spark initiated plasmas; laser initiated plasmas; laser ionization; laser produced plasma; lifetimes; magnetic field; metastable states; modelling; organic seed gas; plasma density; plasma temperature; radiofrequency sustainment; radiofrequency wave produced plasma; seed gases; seeded air plasmas; superexcited states; tetrakis-dimethyl-amino-ethylene; wave absorption; wave frequency; wave penetration; Antenna measurements; Gas lasers; Ionization; Magnetic field measurement; Nitrogen; Plasma density; Plasma measurements; Plasma temperature; Plasma waves; Radio frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
Conference_Location
Monterey, CA, USA
ISSN
0730-9244
Print_ISBN
0-7803-5224-6
Type
conf
DOI
10.1109/PLASMA.1999.829331
Filename
829331
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