Title :
Characterizations of (SiO,Cr1-x)yN1-y thin film resistors for integrated passive application
Author :
Wu, Fan ; Morris, James E.
Author_Institution :
Medtronic, Inc.
Keywords :
Atomic force microscopy; Conductivity; Costs; Nitrogen; Resistors; Sheet materials; Sputtering; Stability; Temperature; Transistors;
Conference_Titel :
Electronic Components and Technology Conference, 2003. Proceedings. 53rd
Print_ISBN :
0-7803-7791-5
DOI :
10.1109/ECTC.2003.1216272
