Title :
A mechanical approach to overcome RF MEMS switch stiction problem
Author :
Mercado, Lei L. ; Shun-Meen Koo ; Lee, Tien-Yu Tom ; Liu, Ltanjun
Author_Institution :
Motorola lnc.
Keywords :
Cellular phones; Communication switching; Contact resistance; Electrodes; Insertion loss; Metal-insulator structures; Microswitches; Radiofrequency microelectromechanical systems; Switches; Voltage;
Conference_Titel :
Electronic Components and Technology Conference, 2003. Proceedings. 53rd
Print_ISBN :
0-7803-7791-5
DOI :
10.1109/ECTC.2003.1216305
