Title :
Tunable ferroelectric capacitor with low-loss electrodes fabricated using reverse side exposure
Author :
Yoon, Yong-Kyu ; Allen, Mark G. ; Hunt, Andrew T.
Author_Institution :
Georgia Institute of Technology
Keywords :
Barium; Binary search trees; Capacitance; Capacitors; Electrodes; Fabrication; Ferroelectric materials; Strontium; Substrates; Titanium compounds;
Conference_Titel :
Electronic Components and Technology Conference, 2003. Proceedings. 53rd
Print_ISBN :
0-7803-7791-5
DOI :
10.1109/ECTC.2003.1216500
