Title :
Optical inspection of arrays and periodic structures using Moire magnification
Author :
Hutley, M.C. ; Stevens, R.F.
Author_Institution :
National Physical Laboratory
fDate :
6/21/1905 12:00:00 AM
Conference_Titel :
Searching for Information: Artificial Intelligence and Information Retrieval Approaches (Ref. No. 1999/199), IEE Two-day Seminar
Conference_Location :
IET
