Novel high Q-factor resonant microsensor platform for chemical and biological applications

Author

Seo, Jae Hyeong ; Brand, Oliver

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

Volume

1

fYear

2005

Firstpage

593

Abstract

A novel resonant microsensor platform for chemical and biological sensing applications in gaseous and liquid environment is reported. To achieve a high quality factor, the disk-shape microstructure is operated in a rotational in-plane mode with typical resonance frequencies between 300 and 700 kHz. The resonators feature electrothermal excitation elements and a piezoresistive Wheatstone bridge for detection, sensitive only to the inplane rotational vibration mode. Resonant microsensors with different dimensions have been fabricated and extensively characterized, achieving quality factors up to 5800 in air. Preliminary tests performed in water after parylene coating show a Q-factor of approx. 100.

Keywords

Q-factor; biosensors; bridge circuits; chemical sensors; circuit resonance; micromechanical resonators; microsensors; piezoresistive devices; vibrational modes; 300 to 700 kHz; biological sensing; chemical sensing; disk-shape microstructure; electrothermal excitation elements; gaseous environment; high Q-factor resonant microsensor; liquid environment; mass-sensitive sensor; parylene coating; piezoresistive Wheatstone bridge; resonance frequencies; rotational in-plane vibration mode; Bridge circuits; Chemical elements; Electrothermal effects; Microsensors; Microstructure; Piezoresistance; Q factor; Resonance; Resonant frequency; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496487

Filename

1496487