• DocumentCode
    1721950
  • Title

    Novel processing approach for sub-micron heterojunction bipolar transistors

  • Author

    Dai, C. ; Liu, William ; Massengale, A. ; Kameyama, A. ; Harris, J.S., Jr.

  • Author_Institution
    Stanford University
  • fYear
    1994
  • fDate
    6/16/1905 12:00:00 AM
  • Firstpage
    89
  • Lastpage
    90
  • Keywords
    Analytical models; Fabrication; Frequency; Heterojunction bipolar transistors; Laboratories; Lithography; Passivation; Performance gain; Solid state circuits; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference, 1994. 52nd Annual
  • Type

    conf

  • DOI
    10.1109/DRC.1994.1009427
  • Filename
    1009427
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1721950