A MEMS 1D optical scanner for laser projection display using self-assembled vertical combs and scan-angle magnifying mechanism

Author

Yoda, M. ; Isamoto, K. ; Chong, C. ; Ito, H. ; Murata, A. ; Kamisuki, S. ; Atobe, M. ; Toshiyoshi, H.

Author_Institution

Seiko Epson Corp., Nagano, Japan

Volume

1

fYear

2005

Firstpage

968

Abstract

We report a novel one-axis MEMS (micro electro mechanical systems) optical scanner for laser projection displays with a scan-angle magnifying mechanism based on a 2-DOF (degrees of freedom) vibration system. Small angular motion (3°) created by the self-assembled electrostatic vertical-comb drive actuator was amplified through the two-mass-two-spring vibration mechanism, and a large scan angle of mirror (30°) was obtained with 140 Vpp at the first resonant frequency (22.3 kHz).

Keywords

display devices; electrostatic actuators; micro-optics; micromachining; optical scanners; self-assembly; 140 V; 22.3 kHz; MEMS 1D optical scanner; electrostatic actuator; electrostatic vertical-comb drive actuator; fabrication; laser projection display; one-axis optical scanner; resonant frequency; scan-angle magnifying mechanism; self-assembled vertical combs; two degrees of freedom vibration system; two-mass-two-spring vibration mechanism; Circuit simulation; Electrostatic actuators; Micromechanical devices; Mirrors; Resonance; Resonant frequency; Solid modeling; Stimulated emission; Two dimensional displays; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496616

Filename

1496616