Title :
The fabrication of filter-less fluorescence detection sensor array using CMOS image sensor technique
Author :
Maruyama, Yuki ; Sawada, Kazuaki ; Takao, Ilidekuni ; Ishida, Makoto
Author_Institution :
Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan
Abstract :
A novel sensor array, which is a filter-less fluorescence detection sensor was successfully fabricated using CMOS integrated circuit technology. Previously filter-less fluorescence detection sensors were proposed and fabricated, and they were able to sense fluorescence intensity. A CMOS image sensor technique was applied for 1-pixel of filter-less fluorescence detection sensor. Consequently, it was confirmed that general CMOS image sensor technique can be applied to the novel filter-less fluorescence detection sensor.
Keywords :
CMOS image sensors; biosensors; fluorescence; CMOS image sensor; CMOS integrated circuit; fabrication; filter-less fluorescence detection; sensor array; Absorption; Band pass filters; Biosensors; CMOS image sensors; CMOS technology; DNA; Fabrication; Fluorescence; Integrated circuit technology; Sensor arrays;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496630