Title :
RF MEMS reliability
Author :
DeNatale, J. ; Mihailovich, R.
Author_Institution :
Rockwell Sci. Co., Thousand Oaks, CA, USA
Abstract :
Device reliability is a key factor in the ultimate insertion of RF MEMS devices into operational systems. In particular, cycle lifetimes of contacting devices such as RF switches can be technically challenging due to the requirement of good contact electrical performance under operational stresses. This paper presents a general discussion of the reliability limiting mechanisms that can impact RF MEMS devices, with an emphasis on the issues relevant to RF switch cycling lifetimes.
Keywords :
microswitches; reliability; RF MEMS device reliability; RF switch cycling lifetimes; operational stresses; Capacitors; Communication switching; Contacts; Microelectromechanical devices; Micromechanical devices; Power semiconductor switches; Radio frequency; Radiofrequency microelectromechanical systems; Surface resistance; Tunable circuits and devices;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1216922
