A micromachined polyimide aperture for stable bilayer lipid membrane (BLM)s

Author

Eray, Mete ; Dogan, Nurmn S. ; Liu, Liangjun ; Koch, Alan R. ; Moffett, David F. ; Silber, Maris ; Van Wie, Bemard J.

Author_Institution

School of Electrical Engineering & Computer Science, Washington State University

fYear

1993

fDate

6/15/1905 12:00:00 AM

Firstpage

142

Lastpage

143

Keywords

Apertures; Biomembranes; Biosensors; Cleaning; Etching; Lipidomics; Planarization; Polyimides; Silicon; Stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 1993. 51st Annual

Type

DOI

10.1109/DRC.1993.1009616

Filename

1009616

Link To Document