Title :
Spurious wave suppression in BAW resonators with frame-like airgap
Author :
Yang, Wenxia ; Tam, Wai-Yip
Author_Institution :
Dept. of Electron. & Inf. Eng., Hong Kong Polytech. Univ., Hong Kong, China
Abstract :
In this paper, a new membrane resonator structure for suppressing the spurious waves is proposed. The proposed structure consists of a piezoelectric slab sandwiched between the bottom electrode with a frame-like airgap and a solid top electrode. The finite-difference time-domain (FDTD) method is applied to extract the displacements to illustrate the reduction of spurious waves.
Keywords :
acoustic resonators; air gaps; bulk acoustic wave devices; electrodes; finite difference time-domain analysis; BAW resonators; FDTD method; bottom electrode; displacement extraction; finite-difference time-domain method; frame-like air gap; membrane resonator structure; piezoelectric slab; solid top electrode; spurious wave reduction; spurious wave suppression; Acoustic waves; Electrodes; Equations; Film bulk acoustic resonators; Finite difference methods; Mathematical model; Time domain analysis;
Conference_Titel :
Frequency Control Symposium (FCS), 2010 IEEE International
Conference_Location :
Newport Beach, CA
Print_ISBN :
978-1-4244-6399-2
DOI :
10.1109/FREQ.2010.5556248
