Investigation of strain sensitivity of photonic crystal nanocavity for mechanical sensing

Author

Tung, Bui Thanh ; Dao, Dzung Viet ; Sugiyam, Susumu

Author_Institution

Ritsumeikan Univ., Kusatsu, Japan

fYear

2010

Firstpage

183

Lastpage

184

Abstract

This paper reports the theoretical investigation of the strain sensitive effect of a 2D photonic crystal (PhC) nanocavity resonator for mechanical sensing applications. By using finite element method (FEM) using ANSYS software and finite different time domain (FDTD) simulation using CrystalWave software, the strain sensitivity of high quality factor PhC nanocavity have been studied. Linear relationships between strain and shift of resonant wavelength of the cavity have been obtained. The sensitivities to longitudinal and transverse strains have been determined to be 1.67 nm/mε and 1.4 nm/mε, respectively.

Keywords

cavity resonators; finite difference time-domain analysis; finite element analysis; photonic crystals; strain sensors; ANSYS software; CrystalWave software; finite different time domain simulation; finite element method; longitudinal strains; mechanical sensing; photonic crystal nanocavity; resonant wavelength shift; strain sensitivity; transverse strains; Cavity resonators; Optical resonators; Sensors; Silicon; Strain; Stress; Time domain analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Conference_Location

Sapporo

Print_ISBN

978-1-4244-8926-8

Electronic_ISBN

978-1-4244-8925-1

Type

conf

DOI

10.1109/OMEMS.2010.5672122

Filename

5672122