DocumentCode :
1728993
Title :
Design and implementation of the control system to vacuum diffusion furnace
Author :
Li Cong ; Zhang Yaning ; Dai Houzhao
Author_Institution :
Sch. of Electr. Eng., Univ. of Jinan, Jinan, China
fYear :
2013
Firstpage :
6428
Lastpage :
6432
Abstract :
This paper proposed the design proposal of the control system for vacuum furnace. The control system consist of a field bus control system (FCS) based on industrial control machine, PLC, intelligent PID instrument etc. The whole system realizes four closed loop controls of three sections of the furnace, which include temperature PID control, gas flow tracking control, Push-pull boat tracking control and furnace vacuum PI control. The upper computer programming software realizes the design of all kinds of control software by using the VB.NET and Access database, which mainly complete equipment monitoring and acquisition all kinds of real-time data of industrial production, control and monitor operation situation of lower computer equipment, store the history data of equipments, download/upload production process data and generate data curves and so on, and make the operation situation of whole process easier to control. Practice proves that the system is reliable operation and meets the demand of precision, and can completely replace the imported products.
Keywords :
closed loop systems; control engineering computing; control system synthesis; field buses; flow control; furnaces; production engineering computing; programmable controllers; semiconductor industry; temperature control; three-term control; Access database; PLC; VB.NET; closed loop control; computer programming software; control system design; equipment monitoring; field bus control system; furnace vacuum PI control; gas flow tracking control; industrial control machine; intelligent PID instrument; push-pull boat tracking control; realtime data acquisition; semiconductor production line; temperature PID control; vacuum diffusion furnace; Computers; Furnaces; Instruments; Process control; Temperature control; Vacuum systems; Access Database; Diffusion furnace; Industrial control computer; PLC; Temperature Instrument; VB.NET;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Control Conference (CCC), 2013 32nd Chinese
Conference_Location :
Xi´an
Type :
conf
Filename :
6640566
Link To Document :
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