DocumentCode :
1730568
Title :
RF MEMS switches: status of the technology
Author :
Rebeiz, G.M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Volume :
2
fYear :
2003
Firstpage :
1726
Abstract :
This paper presents the latest accomplishments in RF MEMS switches, and at the same time, an assessment of their potential applications in defense and commercial systems. It is seen that RF MEMS devices offer spectacular performance at microwave frequencies, but suffer from reliability problems and the potential of relatively high-cost hermetic packaging. Still, this technology offers such tremendous advantages over GaAs and silicon switching devices that, in the author´s opinion, it will find many applications in satellite, base-station and defense applications, particularly at high microwave frequencies.
Keywords :
microswitches; microwave switches; packaging; reliability; RF MEMS switches; base-station; defense applications; high-cost hermetic packaging; reliability; satellite; Circuits; Costs; Electrostatics; Gallium arsenide; Microswitches; Packaging; Radio frequency; Radiofrequency microelectromechanical systems; Silicon; Switches;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
Type :
conf
DOI :
10.1109/SENSOR.2003.1217118
Filename :
1217118
Link To Document :
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