MEMS scanner enabled real-time depth sensitive hyperspectral imaging

We demonstrate a hyperspectral and depth sensitive optical scattering diffusion imaging microsystem, where fast scanning is provided by a CMOS compatible 2-axis MEMS mirror. By using lissajous scanning patterns, large field-of-view (FOV) of 1.2cm × 1.2cm images with lateral resolution of 100μm can be taken at 1.3 frame-per-second (fps). Hyperspectral and depth-sensitive images were acquired on phantom samples consisting of quantum dots (QDs) patterned at various depths in PDMS, showing 6 nm spectral resolution and 0.43 wavelength per second acquisition speed. Images were also acquired on biological sample of porcine epithelium with QDs placed underneath the surface.