The resonant micro fan gas pump for active breathing microchannels

This paper reports on the fluidic and mechanical performance of the resonant micro fan as an in-channel gas pump. Experiments with resonant fan arrays assembled within test channels were performed in order to observe the effects of changing fan length and resonant frequency with respect to volumetric flow rate in the channel. Flow rates of approximately 10 /spl mu/l/min were produced by single fans with the flow increasing to 25 /spl mu/l/min for three fans operated simultaneously in the same channel (the capability exists for many fans to be arrayed in a microchannel system). The ability of the micro fan to collect airborne suspended smoke particles was also experimentally examined.