Title :
Circuit Simulation Model Of Gas Damping In Microstructures With Nontrivial Geometries
Author :
Veijola, Timo ; Ryhinen, T. ; Kuisma, Heikki ; Lahdenpera, Juha
Author_Institution :
Helsinki University Of Technology, Circuit Theory Laboratory
Keywords :
Accelerometers; Circuit simulation; Damping; Equations; Finite difference methods; Fluid flow; Geometry; Microstructure; Silicon; Solid modeling;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721738
