DocumentCode
1732267
Title
In Situ Tensile Strength Measurement Of Thick-film And Thin Film Micromacrined Structures
Author
Greek, Staffan ; Ericson, Fredric ; Johausson, S. ; Schweitz, Jan-Åke
Author_Institution
Uppsala University
Volume
2
fYear
1995
Firstpage
56
Lastpage
59
Keywords
Actuators; Dry etching; Force sensors; Micromanipulators; Performance evaluation; Probes; Tensile stress; Testing; Thickness measurement; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721743
Filename
721743
Link To Document