Title :
TRANSDUCERS ´05. The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (IEEE Cat. No. 05TH8791)
Abstract :
The following topics are dealt with: MEMS and their design and analysis; pressure sensors; 3D fabrication; electrostatic actuators; microdroplets and micro bead technology; carbon nanotube processes; inertial microsystems; surface tension and electrowetting liquid actuators; biochips; AFM/probe fabrication; micropumps; bio-tools; sensor network integration; resonator-type sensors; nano-electrical characterization; biosensors and cells; power generators for stand-alone systems; physical sensors; pneumatic and hydraulic actuators; microfluidics; microlens and laser applications; packaging of microsystems; bio-cells; sensing systems and networks; accelerometers and gyroscopes; micro/nano cantilever sensors; fluid handling actuators; microactuators; stress and strength of MEMS materials; optical MEMS; optical biosensing; DRIE technology; CMOS type chemical sensors; nano and micro-biosystems; micromirrors and applications; fluidics fabrication; air quality monitoring chemical sensors; bio-probes; MEMS spectrometer; concept and analysis in fluids and bubbles; polymer-based chemical devices; bio measurement technology; integration technology; advanced micro/nano machining; micromachining of soft materials; micro/nano patterning; micro channel fabrication; fluidic devices; bio patterning; micro TAS; medical and biology applications; cell handling devices; bio sensors/sensing; chemical sensor materials; electro-chemical devices; gas sensors; RF MEMS switches and antennas; material characterization; packaging technology; instrumentation and biosystems; polymer processes; RF MEMS resonators; chemical sensors for analytical systems; materials for sensors; stress analysis in thin films; special-use chemical sensors.
Keywords :
CMOS integrated circuits; accelerometers; antennas; biosensors; bubbles; carbon nanotubes; chemical sensors; distributed sensors; electric generators; electronics packaging; electrostatic actuators; gas sensors; gyroscopes; hydraulic actuators; inertial systems; laser beam applications; microactuators; microfluidics; microlenses; micromachining; micromechanical resonators; micromirrors; micropumps; microsensors; microswitches; monitoring; nanoelectronics; nanopatterning; optical sensors; pneumatic actuators; pressure sensors; spectrometers; stress analysis; surface tension; thin films; 3D fabrication; CMOS chemical sensors; MEMS analysis; MEMS design; MEMS materials; MEMS spectrometer; RF MEMS antennas; RF MEMS resonators; RF MEMS switches; accelerometers; air quality monitoring chemical sensors; analytical systems; bio measurement technology; bio sensors; bio-cells; bio-probes; bio-tools; biochips; biosensors and cells; biosystem instrumentation; bubbles; carbon nanotube processes; cell handling devices; chemical sensor materials; electro-chemical devices; electrostatic actuators; electrowetting liquid actuators; fluid handling actuators; fluidics fabrication; fluids; gas sensors; gyroscopes; hydraulic actuators; inertial microsystems; integration technology; laser applications; material characterization; micro bead technology; micro cantilever sensors; micro channel fabrication; micro-biosystems; microactuators; microdroplets; microfluidics; microlens applications; micromirror applications; micropumps; microsystem packaging; nano cantilever sensors; nano-biosystems; nano-electrical characterization; nanomachining; optical MEMS; optical biosensing; patterning; physical sensors; pneumatic actuators; polymer processes; polymer-based chemical devices; pressure sensors; resonator-type sensors; sensing systems; sensor network integration; soft material micromachining; stand-alone system power generators; surface tension actuators; thin film stress analysis; transducers;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Conference_Location :
Seoul, South Korea
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497256
