Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT unimorph actuators

Author

Hishinuma, Yoshimitsu ; Yang, Yongwon Eh

Author_Institution

Jet Propulsion Lab., Pasadena, CA, USA

Volume

2

fYear

2005

Firstpage

1167

Abstract

We have demonstrated a large aperture (50 mm × 50 mm) continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array. The DM consists of a continuous, large aperture, silicon membrane "transferred" in its entirety onto a 20 × 20 piezoelectric unimorph actuator array. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 μm at 20 V. An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30 %.

Keywords

adaptive optics; integrated optics; lead compounds; membranes; microactuators; micromirrors; minimisation; nanotechnology; piezoelectric actuators; silicon; zirconium compounds; 2.5 mm; 20 V; 2500 mm; 30 kHz; 5.7 micron; 50 mm; PZT; PZT-Si; PbZrO3TiO3-Si; adaptive optics; device fabrication; energy minimization method; large aperture deformable mirror; lead zirconium titanate; optical characterization; piezoelectric unimorph actuator; single crystal silicon membrane; unimorph actuator array; Apertures; Assembly; Bandwidth; Biomembranes; Delta modulation; Design optimization; Frequency; Mirrors; Piezoelectric actuators; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1497285

Filename

1497285