Title :
A Valve-less Planar Pump In Silicon
Author :
Olsson, Anders ; Eftoksson, P. ; Sternme, G. ; Stemme, Göran
Keywords :
Etching; Glass; Micropumps; Neck; Pumps; Sensor systems; Silicon; Valves; Virtual manufacturing; Wafer bonding;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721803
