Title :
Miniaturised annular transducers built using ultrasound micromachining for medical imaging application
Author :
Ballandras, S. ; Guine, P. ; Maître, P. ; Steichen, W. ; Piranda, B. ; Gelly, J.F.
Author_Institution :
Lab. de Phys. et Metrol. des Oscillateurs, CNRS, Besancon, France
Abstract :
Fabrication and test of a 2 mm diameter 4 channel annular array is described. Comparison between experimentally measured and theoretically predicted admittance of the transducer elements is reported. The theoretical 3D finite element analysis is finally used to identify the electrically measured vibration mode of the device
Keywords :
biomedical transducers; biomedical ultrasonics; finite element analysis; micromachining; ultrasonic transducer arrays; 2 mm; electrically measured vibration mode; experimentally measured admittance; medical imaging application; medical instrumentation; miniaturised annular transducers; theoretical 3D finite element analysis; theoretically predicted admittance; transducer elements; ultrasound micromachining; Biomedical imaging; Biomedical transducers; Fabrication; Finite element methods; Micromachining; Piezoelectric transducers; Testing; Ultrasonic imaging; Ultrasonic transducers; Ultrasonic variables measurement;
Conference_Titel :
Microtechnologies in Medicine and Biology, 1st Annual International, Conference On. 2000
Conference_Location :
Lyon
Print_ISBN :
0-7803-6603-4
DOI :
10.1109/MMB.2000.893769
