Title :
Surface micro-machined polysilicon probes for neurophysiology
Author :
Muthuswamy, J. ; Okandan, M. ; McBrayer, J. ; Thakor, N.V.
Author_Institution :
Dept. of Biomed. Eng., Johns Hopkins Univ., Baltimore, MD, USA
Abstract :
This study explores the feasibility of using surface-micromachining technology for fabricating micro-probes that can be chronically implanted in the brain. The micro-probes were 3 mm long and 50 μm× 2 μm in cross-section. The probes successfully penetrated the brains only when the dura was removed. Chronic implantation of the microprobe for up to 2 weeks produced only minor gliosis
Keywords :
biological techniques; brain; microelectrodes; micromachining; probes; silicon; 2 mum; 2 w; 3 mm; 50 mum; biophysical research technique; chronic implantation; chronically implanted microprobes; dura removal; integrated-circuit fabrication technology; minor gliosis; surface micromachined polysilicon probes; Animals; Chemical technology; Chemical vapor deposition; Etching; Fabrication; Microelectrodes; Micromachining; Neurophysiology; Probes; Silicon;
Conference_Titel :
Engineering in Medicine and Biology Society, 2000. Proceedings of the 22nd Annual International Conference of the IEEE
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-6465-1
DOI :
10.1109/IEMBS.2000.900722
