Thin film imaging technology on glass and plastic

Author

Nathan, A. ; Park, B. ; Sazonov, A. ; Tao, S. ; Gu, Z.H. ; Chan, I. ; Servati, P. ; Karim, K. ; Charania, T. ; Striakhilev, D. ; Ma, Q. ; Murthy, R.V.R.

Author_Institution

Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont., Canada

fYear

2000

fDate

2000

Firstpage

11

Lastpage

14

Abstract

Hydrogenated amorphous silicon (a-Si:H) technology offers a viable technological alternative for improved imaging of optical signals and high energy radiation. This paper reviews X-ray imaging technology in terms of detector operating principles, including optoelectronic characteristics, and fabrication process issues related to pixel (Schottky diode detector plus thin film transistor) integration. Recent results which describe the extension of the current fabrication processes to low (~120°C) temperature are also presented. The low temperature processing enables fabrication of thin electronics on flexible (polymer) substrates

Keywords

Schottky diodes; X-ray detection; X-ray imaging; amorphous semiconductors; doping profiles; elemental semiconductors; hydrogen; image sensors; semiconductor thin films; silicon; thin film transistors; 120 C; Schottky diode detector; Si:H; X-ray imaging technology; a-Si:H technology; detector operating principles; fabrication process issues; fabrication processes; flexible polymer substrates; glass substrates; high energy radiation; hydrogenated amorphous silicon technology; imaging; low temperature processing; optical signals; optoelectronic characteristics; pixel integration; plastic substrates; thin film imaging technology; thin film transistor; Amorphous silicon; Glass; Optical device fabrication; Optical films; Optical imaging; Plastic films; Temperature; X-ray detection; X-ray detectors; X-ray imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics, 2000. ICM 2000. Proceedings of the 12th International Conference on

Conference_Location

Tehran

Print_ISBN

964-360-057-2

Type

conf

DOI

10.1109/ICM.2000.916404

Filename

916404