Title :
A MEMS implementation of an acoustical sensor array
Author :
Chowdhury, Sazzadur ; Ahmadi, M. ; Jullien, G.A. ; Miller, W.C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Windsor Univ., Ont., Canada
Abstract :
A MEMS implementation of an acoustical sensor array is developed for use with a hearing instrument. A square planar array composed of nine capacitive microphones is designed to give a beam-forming and steering capability with constant beam width. Each microphone has a polysilicon germanium diaphragm. A thin silicon nitride back plate and a small airgap. The microphones are separated from each other by a distance of 250 microns and the sensor array covers a die area of 16 mm 2
Keywords :
acoustic transducers; capacitive sensors; hearing aids; microphones; microsensors; 250 micron; MEMS implementation; acoustical sensor array; airgap; back plate; beam-forming; capacitive microphones; constant beam width; diaphragm; die area; hearing instrument; square planar array; steering capability; Acoustic beams; Acoustic sensors; Auditory system; Germanium; Instruments; Micromechanical devices; Microphone arrays; Planar arrays; Sensor arrays; Silicon;
Conference_Titel :
Circuits and Systems, 2001. ISCAS 2001. The 2001 IEEE International Symposium on
Conference_Location :
Sydney, NSW
Print_ISBN :
0-7803-6685-9
DOI :
10.1109/ISCAS.2001.921060
