Title :
Effect of a ground shield of a silicon on-chip spiral inductor
Author :
Murata, Koji ; Hosaka, Takashi ; Sugimoto, Yasuhiro
Author_Institution :
Dept. of Electr. & Electron. Eng., Chuo Univ., Tokyo, Japan
Abstract :
This paper proposes a new layout for a silicon on-chip spiral inductor and analyzes the effectiveness of a ground shield that is considered to enhance the quality factor of a spiral inductor on a silicon chip. The effective series resistance becomes low when a ground shield is placed under a spiral inductor. Furthermore, a spiral inductor with a surrounding ground shield (SGS) does not significantly improve the quality factor, but a spiral inductor with a patterned ground shield (PGS) may do so
Keywords :
MMIC; Q-factor; UHF integrated circuits; electromagnetic shielding; elemental semiconductors; inductors; integrated circuit layout; silicon; RFICs; Si; Si on-chip spiral inductor; Si substrate; effective series resistance; inductor ground shield; inductor layout; patterned ground shield; quality factor; surrounding ground shield; Boolean functions; Data structures; Inductors; Silicon; Spirals;
Conference_Titel :
Microwave Conference, 2000 Asia-Pacific
Conference_Location :
Sydney, NSW
Print_ISBN :
0-7803-6435-X
DOI :
10.1109/APMC.2000.925754
