Micro-fluid device using thick layer piezoactuator prepared on Si micromachined structure

The design and fabrication of a piezoelectric microactuator on a silicon diaphragm is presented for application of micro ink jet. We developed the micro-devices for the fluid transference that are fabricated using thick film technologies for ceramic materials and Si micromachining. The performance of droplet ejection is shown from the optimal design parameters. It is closely related to the precise machining of flow channel structures and the piezoelectric actuator capacity. The features of micro-fabrication and ink drops are described.