DocumentCode
1749313
Title
Analysis of the field electron energy distribution from amorphous carbon-nitride film
Author
Chen, Jun ; Huang, N.Y. ; Liu, X.W. ; Deng, S.Z. ; Xu, N.S.
Author_Institution
State Key Lab for Ultrafast Laser Spectrosc. Study, Zhongshan Univ., Guangzhou, China
fYear
2001
fDate
2001
Firstpage
257
Lastpage
258
Abstract
The field electron energy distribution (FEED) from an amorphous carbon-nitride film has been analyzed to understand its field emission mechanism. The FEED data obtained at different fields are fitted by using a theoretical energy distribution of the free electron approximation and taking into account the broadening induced by the electron spectrometer
Keywords
amorphous state; carbon compounds; curve fitting; electron field emission; electron spectroscopy; free-electron approximation; CN; FEED; FEED data fitting; a-CN film; amorphous carbon-nitride film; electron spectrometer induced broadening; energy distribution; field electron energy distribution; field emission mechanism; free electron approximation; Amorphous materials; Conductive films; Electron emission; Feeds; Flat panel displays; Magnetic analysis; Magnetic films; Spectroscopy; Thermal conductivity; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location
Davis, CA
Print_ISBN
0-7803-7197-6
Type
conf
DOI
10.1109/IVMC.2001.939751
Filename
939751
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