Title :
Electromechanical properties of (Pb,La)TiO3 thin films
Author :
Maiwa, H. ; Ichinose, N.
Author_Institution :
Shonan Inst. of Technol., Fujisawa, Japan
Abstract :
The electromechanical properties of sputter-deposited (Pb,La)TiO 3 thin films were investigated. Dynamic strain-field hysteresis loops were measured by scanning probe microscopy; strains of 0.08 to 0.1% were observed in a bipolar driving field of 142 kV/cm. The field-induced piezoelectric and electrostrictive strains were then estimated, using a phenomenological approach, from measured polarization and field-dependent permittivity data. Qualitative agreement was observed between the measured and calculated displacements; and the compositional dependence of the thin films was analyzed based on the ratio of piezoelectric and electrostrictive strains
Keywords :
dielectric hysteresis; dielectric polarisation; electrostriction; ferroelectric thin films; lanthanum compounds; lead compounds; permittivity; piezoelectric thin films; scanning probe microscopy; sputtered coatings; (Pb,La)TiO3 thin film; (PbLa)TiO3; compositional dependence; dielectric polarization; dynamic strain-field hysteresis loop; electromechanical properties; electrostrictive strain; ferroelectric material; permittivity; piezoelectric strain; scanning probe microscopy; sputter deposition; Capacitive sensors; Electrostriction; Ferroelectric materials; Hysteresis; Permittivity measurement; Piezoelectric films; Scanning probe microscopy; Sputtering; Strain measurement; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-5940-2
DOI :
10.1109/ISAF.2000.941596
