DocumentCode
1753925
Title
Bottleneck elimination for efficiency improvement in equipment engineering data use activities
Author
Shimbo, Masahiro ; Ikeda, Masatoshi ; Minamide, Masahiko ; Matsumura, Hiroshi ; Uchida, Junichi ; Nishimura, Hidetaka
Author_Institution
Semicond. Leading Edge Technol., Inc., Tokyo, Japan
fYear
2010
fDate
18-20 Oct. 2010
Firstpage
1
Lastpage
4
Abstract
This paper discusses the bottleneck step elimination for efficiency improvement in equipment engineering data utilization activities based on the analysis of the common data utilization procedure.
Keywords
data analysis; equipment evaluation; production engineering computing; production equipment; production management; semiconductor industry; bottleneck elimination; bottleneck step elimination; common data utilization procedure; efficiency improvement; equipment engineering data use activity; equipment engineering data utilization activity; Variable speed drives;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM), 2010 International Symposium on
Conference_Location
Tokyo
ISSN
1523-553X
Print_ISBN
978-1-4577-0392-8
Electronic_ISBN
1523-553X
Type
conf
Filename
5750173
Link To Document