• DocumentCode
    1753940
  • Title

    Input plan optimization system for the high mix low volume factory of the semiconductor manufacturing

  • Author

    Kamoda, Koji ; Miwa, Toshiharu ; Fujiwara, Shoichiro ; Chida, Takafumi ; Nishihara, Nobuaki

  • Author_Institution
    Production Eng. Res. Lab., Hitachi, Ltd., Yokohama, Japan
  • fYear
    2010
  • fDate
    18-20 Oct. 2010
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    For the purpose of semiconductor manufacturing TAT (Turn Around Time) reduction, throughput variability reduction for each machine has been requested. For this purpose, this research presents a new dispatching method by calculating number of input volume for each product automatically with a normalized index that quantifies production capability for each machine to manufacturing plan. As a result, the proposed method reduced arrival variability of the bottleneck machine by 33 to 51% to reduce TAT by 13 to 37%.
  • Keywords
    optimisation; semiconductor industry; dispatching method; high mix low volume factory; input plan optimization system; manufacturing plan; normalized index; production capability; semiconductor manufacturing; throughput variability reduction; turn around time reduction; Films; Implants; Indexes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing (ISSM), 2010 International Symposium on
  • Conference_Location
    Tokyo
  • ISSN
    1523-553X
  • Print_ISBN
    978-1-4577-0392-8
  • Electronic_ISBN
    1523-553X
  • Type

    conf

  • Filename
    5750209