Effective start up study and factor analysis for lithography process filter

In order to drive reduced chemical consumption, effective tool operation, effective utilization of next-generation filtration products, and environmental benefits, greater demands will be placed on the development of effective start up procedures for point-of-use filters in advanced lithography resist coating processes. The current study evaluates the effectiveness of two procedural methods, static pressure driven fluid delivery and fluid deaeration, on filter start up improvement. Further, factor analysis revealed inlet pressure to have a significant impact on filter start up quality.