A Wireless MEMS Inertial Switch for Measuring Both Threshold Triggering Acceleration and Response Time

Response time is one of the core attributes for threshold acceleration switches for determining the impact severity. Different from single function inertial switches for only converting circuit states, a wireless inertial microswitch incorporating the bistable flexible mechanism was designed and fabricated using multilayered microelectroforming technology, which can be used for remote detection of both the threshold acceleration and the corresponding response time in severe environments. The threshold snap-through characteristic of the nonlinear bistable mechanism has been introduced to achieve the threshold acceleration sensing capability. The switch mainly consists of one wireless module, one proof mass supported by two pairs of ultralong V-shaped slender beams with the dimension of 28.0~μ m × 25.0 μm × 5150.0 μm, and two contact points for recording triggering times through the high speed sending and receiving wireless module. Then, an accurate design model for analyzing the threshold acceleration and the dynamic response time was established. The 20 repeated experimental results are in good agreement under the same triggering threshold acceleration of 32.38 g, in which, the response time with the traveling distance of 530.0~μm is 179.80 ± 0.20 ms.