DocumentCode
1759367
Title
Memory Die Clustering and Matching for Optimal Voltage Window in Semiconductor
Author
Yongwon Park ; Seokho Kang ; Sungzoon Cho
Author_Institution
Mobile Dev. Div., SK Hynix Semicond. Inc., Icheon, South Korea
Volume
28
Issue
2
fYear
2015
fDate
42125
Firstpage
180
Lastpage
187
Abstract
In this paper, we propose a method to optimize the product performance instantly by utilizing the internal voltage trimming circuit for Dynamic Random Access Memory (DRAM) memory. Specifically, we first define the verification wafer as the internal voltage characteristics using the clustering technique. Second, the optimized voltage conditions are applied to a normal wafer being matched with a verification wafer. The proposed method makes the ability to apply a different voltage trimming condition for each dies internal voltage circuit depending on their characteristics, thereby improving the characteristics of the individual dies and reducing the fail bit count (FBC) further. The experimental results on the real-application case show that our proposed method reduces the FBC by 1%-5%, which contributes yield enhancement and quality improvement of DRAM memory by raising the efficiency of the redundancy cell repair in the repair process.
Keywords
DRAM chips; circuit optimisation; pattern clustering; DRAM; DRAM memory; FBC; dies internal voltage circuit; dynamic random access memory; fail bit count; internal voltage characteristics; internal voltage trimming circuit; memory die clustering technique; optimized voltage conditions; product performance optimization; redundancy cell repair process; verification wafer; yield enhancement; Couplings; Fabrication; Maintenance engineering; Semiconductor device measurement; Threshold voltage; Voltage measurement; DRAM; Semiconductor; dynamic random access memory (DRAM); electric die sort; electric die sort (EDS); memory repair; semiconductor; voltage trimming circuit; wafer memory test;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2015.2409856
Filename
7056502
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