• DocumentCode
    1769508
  • Title

    Monolithic three dimensional dielectrophoretic actuator for positioning optics fabricated by femtosecond laser

  • Author

    Tao Yang ; Bellouard, Yves

  • Author_Institution
    Dept. of Mech. Eng., Eindhoven Univ. of Technol., Eindhoven, Netherlands
  • fYear
    2014
  • fDate
    8-13 June 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report a monolithic three dimensional dielectrophoretic micro-actuator fabricated by femtosecond laser in fused silica. Such actuators are useful for fine positioning of optical fibers and for introducing optomechanical coupling in waveguides.
  • Keywords
    electrophoresis; high-speed optical techniques; laser materials processing; micro-optomechanical devices; microactuators; microfabrication; optical fibre fabrication; silicon compounds; SiO2; femtosecond laser; fused silica; monolithic three-dimensional dielectrophoretic microactuator; optical fiber positioning; optical waveguides; optomechanical coupling; Dielectrophoresis; Electric fields; Force; Resonant frequency; Silicon compounds; Ultrafast optics; Waveguide lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2014 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6988370
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1769508