Title :
Femtosecond pulses for 3-D surface measurement of microelectronic step-structures
Author :
Young-Jin Kim ; Woo-Deok Joo ; Jiyong Park ; Seungman Kim ; Seung-Woo Kim
Author_Institution :
Dept. of Mech. Eng., Ultrafast Opt. for Ultraprecision Technol. Res. Group, Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
Abstract :
We present a fast and precise 3-D measurement of microelectronic step-structures over a wide field-of-view by utilizing high spatial coherence, low temporal coherence and repetition rate tunablility of femtosecond laser pulses.
Keywords :
high-speed optical techniques; integrated circuit testing; measurement by laser beam; surface topography measurement; 3D surface measurement; femtosecond laser pulses; femtosecond pulses; high spatial coherence; low temporal coherence; microelectronic step-structures; repetition rate tunablility; Measurement by laser beam; Microelectronics; Optical interferometry; Optical variables measurement; Semiconductor device measurement; Ultrafast electronics; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
