Title :
Modeling and optimization of magnesiothermically-formed porous silicon in silicon-on-insulator microresonator sensors
Author :
Zhixuan Xia ; Eftekhar, Ali Asghar ; Qing Li ; Adibi, Ali ; Davis, Stan C. ; Gordin, Ari S. ; Sandhage, Kenneth H.
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We develop a model for silicon-on-insulator microresonators with magnesiothermically-formed porous silicon cladding possessing three-dimensional interconnected pores. Investigation of waveguide design and geometrical parameters indicates an optimized areal mass sensitivity of ~ 0.2 pm/(pg/mm2).
Keywords :
elemental semiconductors; micro-optics; microcavities; microsensors; optical design techniques; optical materials; optical resonators; optical sensors; optical waveguides; optimisation; porous semiconductors; silicon; silicon-on-insulator; Si; magnesiothermically-formed porous silicon; optimization; optimized areal mass sensitivity; silicon-on-insulator microresonator sensors; three-dimensional interconnected pores; waveguide design; Optical films; Optical resonators; Optical sensors; Optical waveguides; Sensitivity; Silicon; Strips;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
