Title :
Tunable transimpedance sustaining-amplifier for high impedance CMOS-MEMS resonators
Author :
Sobreviela, G. ; Uranga, A. ; Barniol, N.
Author_Institution :
Dept. of Electron. Eng., Univ. Autonoma de Barcelona, Cerdanyola del Vallés, Spain
fDate :
June 30 2014-July 3 2014
Abstract :
This paper presents a full-custom tunable gain transimpedance amplifier (TIA) designed to work as a sustaining amplifier for a monolithic CMOS-MEMS oscillator. Based on a capacitive detection of the MEMS current, the implemented differential structure allows to compensate a wide range of motional resistances (between 1.4MΩ to 20MΩ) exhibiting an exceptional low input current noise of 32fA/√Hz @ 20 MHz.
Keywords :
CMOS analogue integrated circuits; circuit tuning; micromechanical resonators; operational amplifiers; oscillators; TIA; capacitive detection; differential structure; exceptional low input current noise; full-custom tunable gain transimpedance amplifier; high impedance CMOS-MEMS resonators; monolithic CMOS-MEMS oscillator; motional resistances; resistance 1.4 Mohm to 20 Mohm; tunable transimpedance sustaining-amplifier; Capacitance; Gain; Micromechanical devices; Noise; Oscillators; Resistance; Resonant frequency; CMOS-MEMS; MEMS-based Oscillatorr; Radio-Frequency MEMS;
Conference_Titel :
Ph.D. Research in Microelectronics and Electronics (PRIME), 2014 10th Conference on
Conference_Location :
Grenoble
DOI :
10.1109/PRIME.2014.6872735
