Title :
Carbon integrated optomechanical systems
Author :
Pernice, Wolfram H. P.
Author_Institution :
Inst. of Nanotechnol., Karlsruhe Inst. of Technol., Eggenstein-Leopoldshafen, Germany
Abstract :
I present an integrated optomechanical platform based on polycrystalline diamond thin films. Free-standing resonators with high mechanical quality factors are excited both with gradient optical forces and through electrostatic actuation.
Keywords :
Q-factor; carbon; diamond; electrostatic actuators; integrated optics; optical resonators; thin films; C; carbon integrated optomechanical systems; electrostatic actuation; free-standing resonators; gradient optical forces; high mechanical quality factors; integrated optomechanical platform; polycrystalline diamond thin films; Diamonds; Optical device fabrication; Optical films; Optical interferometry; Optical resonators; Optical surface waves; Optical waveguides;
Conference_Titel :
Photonics Conference (IPC), 2014 IEEE
Conference_Location :
San Diego, CA
DOI :
10.1109/IPCon.2014.6995461
