Title :
“MEMS de Piano”- an experimental course of design, fabrication, and testing of MEMS oscillator
Author :
Mita, Y. ; Kubota, Minoru ; Denoual, Matthieu ; Lebrasseur, Eric ; Sawamura, Tomoki
Author_Institution :
Dept. of Electr. Eng. & Inf. Syst., Univ. of Tokyo, Tokyo, Japan
Abstract :
Since 2005, an experimental course of design, fabrication, and testing of MEMS resonators is given to undergraduate and graduate students of the University of Tokyo. Through the experiences, an optimal-for-course resonator design (= the design with which all students have working device) was identified. Several “golden rules” were described for deeper students´ understanding. Further extension of the course is presented in the paper: Integration with VLSI read-out circuit. A capacitance readout ASIC that can monolithically be integrated with MEMS resonator was fabricated with 0.6 μm CMOS technology on an SOI wafer and its functionality was verified.
Keywords :
CMOS analogue integrated circuits; VLSI; application specific integrated circuits; educational courses; educational institutions; electronic engineering education; integrated circuit design; integrated circuit testing; microfabrication; micromechanical resonators; oscillators; readout electronics; CMOS technology; MEMS de Piano; MEMS oscillator design; MEMS oscillator fabrication; MEMS oscillator testing; MEMS resonators; SOI wafer; University of Tokyo; VLSI read-out circuit integration; capacitance readout ASIC; golden rules; graduate students; optimal-for-course resonator design; size 0.6 mum; undergraduate students; Actuators; Equations; Finite element analysis; Frequency measurement; Micromechanical devices; Resonant frequency; Springs;
Conference_Titel :
Microelectronics Education (EWME), 10th European Workshop on
Conference_Location :
Tallinn
DOI :
10.1109/EWME.2014.6877420
