Design of multi-state actuator for mm-wave reconfigurable front-end circuits using CMOS-MEMS technologies

Author

Yu-Sheng Su ; Chia-Wei Chang ; Yi-Chen Liu ; Yi-Ming Chen ; Chia-Can Chang ; Sheng-Fuh Chang

Author_Institution

Dept. of Electr. Eng., Nat. Chung Cheng Univ., Chiayi, Taiwan

fYear

2014

fDate

6-7 Oct. 2014

Firstpage

664

Lastpage

667

Abstract

Reconfigurability in mm-wave circuits and systems become desired in recent years. In this work, the parallel-beam driven actuator is modified in two ways to enhance the tuning capability. In cooperated with the proposed actuator, two V-band frequency-tunable front-end circuits are demonstrated. The bandstop filter is fabricated in 0.35-μm CMOS-MEMS process, providing five-band switching within 51-63.6 GHz with band rejection > 20 dB. The slot antenna in 0.18-μm CMOS-MEMS shows seven-band switching from 46.6 to 56 GHz with the antenna gain > -15.6 dBi. The measurements present a good agreement with simulated results.

Keywords

CMOS integrated circuits; band-stop filters; micromechanical devices; millimetre wave circuits; slot antennas; CMOS-MEMS technologies; bandstop filter; five-band switching; frequency 46.6 GHz to 56 GHz; frequency 51 GHz to 63.6 GHz; frequency-tunable front-end circuits; mm-wave reconfigurable front-end circuits; multistate actuator; parallel-beam driven actuator; size 0.18 mum; size 0.35 mum; slot antenna; tuning capability; Actuators; Antenna measurements; CMOS integrated circuits; Fingers; Frequency measurement; Micromechanical devices; Slot antennas; Reconfigurability; actuator; band switching; bandstop filter; slot antenna;

fLanguage

English

Publisher

ieee

Conference_Titel

European Microwave Integrated Circuit Conference (EuMIC), 2014 9th

Conference_Location

Rome

Type

conf

DOI

10.1109/EuMIC.2014.6997944

Filename

6997944