Two-axis MEMS scanning mirror driven by a single PZT actuator

In this paper, a novel design for two-axis MEMS scanning mirror driven by a single PZT is presented. For fast scan, the bending moment of the actuator is transferred to torque of the fast torsion bars. An offset is introduced in the present design so that the torsional vibration of the slow scan can be excited by a vertical displacement of the actuator. A vibration analysis reveals that there exists an optimum offset to maximize the slow scanning angle. A simple MEMS process is presented and then a scanning angle test validates the analytical results.