DocumentCode
1784474
Title
Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes
Author
Bazaei, Ali ; Mohammadi, Arash ; Reza Moheimani, S.O.
Author_Institution
Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Newcastle, NSW, Australia
fYear
2014
fDate
8-11 July 2014
Firstpage
1464
Lastpage
1468
Abstract
This paper addresses effects of constant voltage and current biasing methods on sensing bandwidth of electrothermal displacement sensors in micro-electromechanical systems (MEMS). The dynamic response of the sensor is modeled based on first principles. The obtained model successfully captures a variety of nonlinear phenomena. Experiments are conducted to confirm the validity of the model and simulation results.
Keywords
displacement measurement; electric current measurement; microfabrication; microsensors; transducers; voltage measurement; constant current biasing method; constant voltage biasing method; dynamic response; electrothermal MEMS transducer; electrothermal displacement sensor; first principle; microelectromechanical system; microfabrication; nonlinear phenomena; Bandwidth; Mathematical model; Micromechanical devices; Resistance heating; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Intelligent Mechatronics (AIM), 2014 IEEE/ASME International Conference on
Conference_Location
Besacon
Type
conf
DOI
10.1109/AIM.2014.6878289
Filename
6878289
Link To Document