Title :
Microelectromechanical Components For Articulated Microrobots
Author :
Yeh, Richard ; Kruglick, Ezekiel J J ; Pister, Kristofer S J
Keywords :
Couplings; Electrostatics; Fasteners; Glass; Manipulators; Micromotors; Payloads; Robots; Substrates; Testing;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721817
