Title :
Surface-micromachined Mirrors For Laser-beam Positioning
Author :
Tien, N.C. ; Solgaard, O. ; Kiang, M.H. ; Daneman, M. ; Lau, K.Y. ; Muller, R.S.
Keywords :
Actuators; Laser beams; Laser theory; Mirrors; Optical beams; Optical films; Optical sensors; Optical surface waves; Substrates; Surface emitting lasers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721819
