Title :
Verification Of The Micromechanical Characteristics Of Electrostatic Linear Actuators
Author :
Kohl, M. ; Göttert, J. ; Mohr, J.
Keywords :
Capacitors; Electrostatic actuators; Electrostatic measurements; Force measurement; Hydraulic actuators; Micromechanical devices; Mirrors; Resonance; Springs; Testing;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721831
