DocumentCode

1801751

Title

A Bi-directional Silicon Orifice Flow Sensor Characterised For Fluid Temperature And Pressure

Author

van der Wie, A.J. ; Boillat, M.A. ; de Rooij, N.F.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

420

Lastpage

423

Keywords

Apertures; Bidirectional control; Bonding; Bridge circuits; Orifices; Piezoresistance; Sensor phenomena and characterization; Shape; Silicon; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721836

Filename

721836