Development of a wireless environmental sensor system and MEMS-based RF circuit components

Author

Yoon, Euisik ; Yun, Kwang-Seok

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea

Volume

2

fYear

2005

fDate

5-9 June 2005

Firstpage

1981

Abstract

This paper reports a miniaturized environmental sensor system integrated with RF communication module. This system has been developed for on-site monitoring of water pollution by heavy metal ions. The system is composed of an electrochemical sensor, a custom potentiostat module, and an RF module for wireless communication. Also, the authors presented monolithic MEMS VCOs integrated with high-Q MEMS inductors and MEMS transmission lines for low-power wireless transceiver applications. Phase noise of the proposed MEMS VCOs has been improved by more than 7 dBc/Hz compared with their CMOS counterparts at 1MHz offset from center frequencies of 5GHz and 13 GHz, respectively.

Keywords

electrochemical sensors; microsensors; voltage-controlled oscillators; wireless sensor networks; 13 GHz; 5 GHz; MEMS; RF circuit components; VCO; electrochemical sensor; on-site monitoring; potentiostat module; water pollution; wireless communication; wireless environmental sensor system development; Circuits; Inductors; Micromechanical devices; Monitoring; Radio frequency; Sensor systems; Transmission lines; Water pollution; Wireless communication; Wireless sensor networks;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1497489

Filename

1497489